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New computing and Neuromorphic Research
M3D-SoC
ReRAM Device & Array Application
Artificial Neuron and Network
Logic and In-memory Computing
P-bit Computing
Memory & Logic Research
3D DRAM
DRAM Capacitor
Thin Film Transistor
Ferroelectric
Phase Change Memory
Resistive Switching Memory
Facility
HOME > Research > Facility
Facility
New Rapid Thermal Process
Wavelength Dispersive X-ray Fluorescence Analyzer (WDXRD)
Atomic Force Microscopy (Park Systems)
Probe station (Bldg 39.) (MS TECH)
Work Station
RT
이루자 6” wafer Sputter
RTA
ALD system for MgO, HZO
ALD system for BeO, MgO
ALD system for TiO2, ZrO2, Al2O3, Y2O3 deposition
ALD system for SrTiO3
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2
3
4
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전체분류
Deposition
Furnace
Measurement
Analysis
Etc
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HOME > Research > Facility