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New computing and Neuromorphic Research
M3D-SoC
ReRAM Device & Array Application
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P-bit Computing
Memory & Logic Research
3D DRAM
DRAM Capacitor
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Facility
HOME > Research > Facility
Facility
ALD system for ZnSnO
ALD system for Ru & RuO2
ALD system for HfO2, Al2O3,ZrO2 & HfSiOx
ALD system for GeSbTe(Quros)
ALD system for GeSbTe (CN1)
ALD system for TiO2, Al2O3, Al-doped TiO2
Sputter system for IGZO, ZnO & ZTO
Sputter system for Oxide semiconductor
Sputter system for Pt & W
ALD system for NiO, TiO2
Sputter system
Conventional Vertical Furnace
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2
3
4
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Deposition
Furnace
Measurement
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