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33

Jae Hyuck Jang, Jeong Hwan Kim, Hyung-Suk Jung, Sang Young Lee, Hyo Kyeom Kim, Miyoung Kim,  and Cheol Seong Hwang

Deposition characteristic and structure analysis of TaCxNy film with new Ta precursor (ChanTAL)deposited by PEALD

ALD 2010, Seoul, June 21-23 (2010), Poster

32

Taeyong Eom, Seol Choi, Byoung Joon Choi, Min Hwan Lee, Sang Ho Ra, Woongkyu Lee, Deok-Yong Cho, Moo-Sung Kim, Manchao Xiao, and Cheol Seong Hwang

Thermal atomic layer deposition of GeTe2-Sb2Te3 films for the confined cell structured phase change memory

ALD 2010, Seoul, June 21-23 (2010), Oral

31

Sang Woon Lee, Jeong Hwan Han, Seong Keun Kim, Sora Han, Cheol Seong Hwang, Christian Dussarrat, and Julien Gatineau

SrTiO3 Thin Films with Highly Enhanced Atomic Layer Deposition Rate for Ultrahigh Density Capacitors

ALD 2010, Seoul, June 21-23 (2010), Oral 

30

Hyo Kyeom Kim, Hyung-Suk Jung, Jae Hyuck Jang, Jeong Hwan Kim, Sang Young Lee, and Cheol Seong Hwang

Systematic study of ALD grown HfSiO gate dielectrics with various Hf/Hf+Si Ratios

ALD 2010, Seoul, June 21-23 (2010), Oral

29

Seong Keun Kim, Gyu-Jin Choi, Minha Seo, Sang Woon Lee, Jeong Hwan Han and Cheol Seong Hwang

TiO2 AND Al doped TiO2 films grown by atomic layer deposition for next generation DRAM capacitor

ISIF 2010, Conrad San Juan Condado Plaza, Puerto Rico, June 13-16 (2010)

28

Seol Choi, Byung Joon Choi, Taeyong Eom, Jae Hyuck Jang, Woong Kyu Lee and Cheol Seong Hwang

Growth and crystallization behaviors of Ge doped Sb-Te thin films deposited by a combined plasma enhanced chemical vapor and atomic layer depositions

ISIF 2010, Conrad San Juan Condado Plaza, Puerto Rico, June 13-16 (2010), Oral

27

Joohwi Lee, Jung-Hae Choi, Seung-Cheol Lee, Cheol Seong Hwang

First-principles calculations on the formation and migration of the vacancy in strained Ge

2010 ´ëÇѱݼÓÀç·áÇÐȸ Ãá°èÇмú´ëȸ, Çö´ë¼º¿ì¸®Á¶Æ®, April 22-23 (2010), Oral

26

Taeyong Eom, Seol Choi, Byung Joon Choi, Sangho Rha, Woongkyu Lee, Cheol Seong Hwang and Moo Seong Kim

Atomic Layer Deposition of (GeTe2)x(Sb2Te3)y Films Using Novel Precursors for Phase Change Memory

MRS spring meeting 2010, San Francisco Marriott, April 6 (2010), Poster

25

Seol Choi, Byung Joon Choi, Taeyong Eom, Jae Hyuck Jang, Woongkyu Lee and Cheol Seong Hwang

Growth and Crystallization Behavior of Ge Doped SbxTey Thin Films Deposited by a Plasma-enhanced CVD

MRS spring meeting 2010, San Francisco Marriott, April 6 (2010), Poster

24

Gun Hwan Kim, Jun yeong Seok, Kyung Min Kim, Min Hwan Lee and Cheol Seong Hwang

Influence of Electrode Material on the Interconnect Line Resistance and Performance of Resistive Cross Bar Array Using TiO2 Thin Film

MRS spring meeting 2010, San Francisco Marriott, April 7 (2010), Poster