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31

Yeon Woo Yoo, Woongkyu Lee, Woojin Jeon, Cheol Hyun An, Cheol Seong Hwang

Properties of atomic layer deposited ZrO2 films on various substrates with new Zr precursor

CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, October 14-18 (2013), poster

30

Un Ki Kim, Sang Ho Rha, Jeong Hwan Kim, Yoon Jang Chung, Jisim Jung, Eun Suk Hwang, Joohwi Lee, Tae Joo Park, Jung-Hae Choi, Cheol Seong Hwang

Study on the defects in metal-organic chemical vapor deposited zinc tin oxide using negative bias illumination stability analysis
CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, October 14-18 (2013), poster

29

Woongkyu Lee, Woojin Jeon, Yeon Woo Yoo, Cheol Hyun An, Cheol Seong Hwang

Formation of micro-defects in atomic layer deposited SrTiO3 films by rapid thermal annealing

CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, October 14-18 (2013), poster

28

Woojin Jeon, Woongkyu Lee, Yeon Woo Yoo, Cheol Hyun An, Cheol Seong Hwang
Understanding the variations in leakage conduction mechanism of ALD TiO2 film by Al-doping

CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, October 14-18 (2013), poster

27

Yu Jin Kim, Min Hyuk Park, Han Joon Kim, Doo Seok Jeong, Cheol Seong Hwang

Negative capacitance in ferroelectric oxides

CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, October 14-18 (2013)

26

Yeon Woo Yoo, Woongkyu Lee, Woojin Jeon, Cheol Hyun An, Won Seok Han and Cheol Seong Hwang

Atomic Layer Deposited ZrO2 Films on Various Substrates with New Zr Precursor

ALD, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013), poster

25

An Cheol Hyun, Woojin Jeon, Woongkyu Lee, Yeon Woo Yoo and Cheol Seong Hwang

Improving step coverage of SrRuO3 film grown by combining ALD SrO and CVD RuO2 or Ru layers

ALD, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013), poster

24

Seul Ji Song, Sang Woon Lee, Jun Yeong Seok, Jung Ho Yoon, Kyung Jean Yoon, Clement Lansalot, Chang Hee Ko, and Cheol Seong Hwang

Atomic Layer deposition of Tantalum oxide film using Ta(N(C4H9))(C5H4)(N(C2H5)2)2 and plasma-activated H2O

ALD, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013), poster

23

Woongkyu Lee, Woojin Jeon, Yeon Woo Yoo, Cheol Hyun An and Cheol Seong Hwang

Reducing Micro-defect Formation in Atomic Layer Deposited SrTiO3 Films during Crystallization Annealing

ALD, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013), poster

22

Jae ho Lee, Il-Hyuk Yu, Sang Young Lee, and Cheol Seong Hwang

Dielectric characteristics of phase controlled Hf1-xZrxO2 high-k materials

ALD, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013), poster