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32

Seong Keun Kim, Oh Seong Kwon, and Cheol Seong Hwang

ZnO Thin Films Deposited by Atomic Layer Deposition Technique Using O3 as Oxidant

15th International Symposium on Integrated Ferroelectrics, Colorado Springs, USA, March 9-12 (2003), Poster


31

Doo Seok Jeong, Kun Ho Ahn, Woo Young Park, and Cheol Seong Hwang

The Positive Temperature Coefficient of Resistivity Effect in Paraelectric (Ba,Sr)TiO3 Thin Films

4th Asian Meeting on Ferroelectrics, Indian Institute of Science, Bangalore, India, December 12-15 (2003)


30

Kun Ho Ahn, Woo Young Park, and Cheol Seong Hwang

Thickness-dependent Dielectric Constants and Phase Transition Temperatures of (Ba,Sr)TiO3 Thin Films with Different Stresses

4th Asian Meeting on Ferroelectrics, Indian Institute of Science, Bangalore, India, December12-15 (2003)


29

Cheol Seong Hwang, Moonjoo Cho, Hongbae Park, Jaehoo Park, and Suk Woo Lee

Improvement in High-k HfO2 Films Processing and MOSFET Performances

4th Asian Meeting on Ferroelectrics, Indian Institute of Science, Bangalore, India, December 12-15 (2003)

28

Hong Bae Park, Moonju Cho, Jeahoo Park, Suk Woo Lee, and Cheol Seong Hwang

The adoption and nitridation of Al2O3 inter-layer for improving thermal stability and flat-band behavior of HfO2 gate dielectic films grown by atomic layer deposition

2003 MRS Fall Meeting, Boston, MA, USA, Dec 1-5 (2003)

27

Suk Woo Lee, Jaehoo Park, Hong Bae Park, Moonju Cho, and Cheol Seong Hwang

Analysis of N2, NH3 annealing effect on HfxAlyOz gate dielectric films grown by chemical vapor deposition using a single molecular precursor

2003 MRS Fall Meeting, Boston, MA, USA, Dec 1-5 (2003)

26

Jung-Hoon Yeom, Seung-Hyun Kim, Chang Young Koo, Jong-hyeon Cheon, Jowoong Ha, and Cheol Seong Hwang

Charge Retention Characteristics of PZT Thin Films for High Density FeRAM Devices

2003 MRS Fall Meeting, Boston, MA, USA, Dec 1-5 (2003)

25

D. S. Jeong, K. H. Ahn, W. Y. Park, C. S. Hwang

The Positive Temperature Coefficient of Resistivity Effect in Paraelecric (Ba,Sr)TiO3 Thin Films

The 8th IUMRS International Conference on Advanced Materials, Yokohama, Japan, Oct 8-13 (2003)

24

JinShi-Zhao, Dong-yeon Park, Cheol Seong Hwang, Yong Ki Han, Cheol Hoon Yang and Ki Young Oh

Liquid Delivery Metal-organic Chemical Vapor Deposition of Pb(Zr,Ti)O3 Thin Films at Low Temperature(<500¡É) Using New Precursors

The 8th IUMRS International Conference on Advanced Materials, Yokohama, Japan, Oct 8-13 (2003)

23

O. S. Kwon, S. K. Kim, C. S. Hwang, J. Jeong

Atomic Layer Deposition of SrTiO3 Films Using Remote-plasma Activated H2O as the Reactant and Conventional Metal-organic Precursors

The 8th IUMRS International Conference on Advanced Materials, Yokohama, Japan, Oct 8-13 (2003)