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20

Oh Seong Kwon, Seong Keun Kim, Cheol Seong Hwang

Atomic-Layer-Deposition of SrTiO3 Thin Films Using Remote-Plasma Activated H2O as an Oxidant

MRS 2002 fall meeting, Boston, Ma, USA, Dec 2 (2002)

19

Hong Bae Park, Moonju Cho, Jaehoo Park, Cheol Seong Hwang

Thermal Stability of Atomic-Layer-Deposited Thin Films on the SiN-Passivated Si Substrate

MRS 2002 fall meeting, Boston, Ma, USA, Dec 2 (2002)

18

Seong Keun Kim, Oh Seong Kwon, Cheol Seong Hwang

Electrical Characterization of Atomic-layer Deposited SrTiO3 Thin Films for CMOS Application

MRS 2002 fall meeting, Boston, Ma, USA, Dec 2 (2002)

17

Jin Shi-Zhao, Seehwa Jeong and Cheol Seong Hwang

Metal-organic Chemical Vapor Deposition of PZT Thin Films with Different Precursor Solution for Mass-Production Compatibility

MRS 2002 fall meeting, Boston, Ma, USA, Dec 2 (2002)

16

Cheol Seong Hwang, and Jin Shi-Zhao

Low temperature MOCVD of PZT thin films for FeRAM applications

MRS 2002 fall meeting, Boston, Ma, USA, Dec 2 (2002)

15

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On-axis¿Í off-axis ¹æ½Ä rf ¸¶±×³×Æ®·Ð ½ºÆÛÅ͸µ¹ýÀ¸·Î ÁõÂøµÈ (Ba, Sr)TiO3 ÃàÀü¹Ú¸·¿¡¼­ÀÇ Àü±âÀû ¹°¼º¿¡ ´ëÇÑ ½ºÆ®·¹½º ¿µÇâ

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14

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Hf[(CH3)2]4 precusor¸¦ ÀÌ¿ëÇÑ HfO2 ¹Ú¸·ÀÇ ¼ºÀå±â±¸¿Í Àü±âÀû ¼ºÁú¿¡ °üÇÑ °íÂû

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13

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Hf(MMP)4 ¿ø·á ¹°ÁúÀ» ÀÌ¿ëÇؼ­ ÁõÂøÇÑ MOCVD HfO2 ¹Ú¸·ÀÇ Æ¯¼º ºÐ¼®

Çѱ¹Àç·áÇÐȸ, ´ëÀü ¹èÁ¦´ë, 2002³â 11¿ù 1ÀÏ

12

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H2O plasma¸¦ ÀÌ¿ëÇÑ SrTiO3 Atomic Layer Deposition

Çѱ¹Àç·áÇÐȸ, ´ëÀü ¹èÁ¦´ë, 2002³â 11¿ù 1ÀÏ

11

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Sol-gel ¹ýÀ¸·Î ÁõÂøµÈ Pb(Zr,Ti)O3 ¹Ú¸·ÀÇ °­À¯Àü Ư¼º¿¡ ¹ÌÄ¡´Â Pt ÇϺÎÀü±Ø µÎ²² ¿µ

Çѱ¹Àç·áÇÐȸ, ´ëÀü ¹èÁ¦´ë, 2002³â 11¿ù 1ÀÏ