| 28 |
Seung Kyu Ryoo, Kyung Do Kim, and Cheol Seong Hwang* Unveiling the Impact of Elevated Temperature Annealing on AlScN Films under Nitrogen and Ammonia Ambient Conditions 2023 IEEE ISAF-ISIF-PFM, Cleveland, Ohio, USA, July 23 to 27, Poster |
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| 27 |
Kyung Do Kim, Yong Bin Lee, Suk Hyun Lee, In Soo Lee, Seungyong Byun, Jae Hoon Lee, Hani Kim, Hyeon Woo Park, and Cheol Seong Hwang Origin of fatigue phenomenon in aluminum scandium nitride 2023 IEEE ISAF-ISIF-PFM, Cleveland, Ohio, USA, July 23 to 27, Poster |
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| 26 |
SeongJae Shin, Seung Yong Byun, Hani Kim, and Cheol Seong Hwang* The atomic layer deposited 5nm Ferroelectric/Antiferroelectric hafnium zirconium oxide using heteroleptic Hf/Zr precursor
2023 IEEE ISAF-ISIF-PFM, Cleveland, Ohio, USA, July 23 to 27, Poster |
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| 25 |
Yu Kyung Park, Hae Won Song, Tae Kyun Kim, Junil Lim, Haengha Seo, Heewon Paik, Jonghoon Shin, and Cheol Seong Hwang Magnesium-doping in TiO2 Dielectric Films for DRAM Capacitor Applications
23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster |
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| 24 |
Youngsin Kim, Junil Lim, Dae Seon Kwon, Keonuk Lee, Yukyung Park, Haengha Seo, Tae Kyun Kim, Heewon Paik, Haewon Song, Jong Hoon Shin, and Cheol Seong Hwang Growth and crystallization of SrRuO3 films by atomic layer deposition depending on the substrates 23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster |
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| 23 |
Haengha Seo, Jonghoon Shin, Junil Lim, Tae Kyun Kim, Heewon Paik, and Cheol Seong Hwang Non-Diffusive Phenomenon of Al and Y Doping in the ZrO2/Al2O3 and ZrO2/Y2O3 Bilayer Thin-Films and Its Influence on the Field-Induced Ferroelectric Properties 23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster |
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| 22 |
Tae Kyun Kim, Dae Seon Kwon, Junil Lim, Haengha Seo, Heewon Paik, Jonghoon Shin, and Cheol Seong Hwang Yttrium-doping in TiO2 Films for DRAM Capacitor Applications
23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster |
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| 21 |
Junil Lim, Kun Hee Ye, Dae Seon Kwon, Haengha Seo, Tae Kyun Kim, Heewon Paik, Haewon Song, Jong Hoon Shin, Jung-Hae Choi and Cheol Seong Hwang Improved Properties of the SrRuO3 Electrode by Controlling Annealing Conditions and Adopting Al-doping 23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster |
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| 20 |
Heewon Paik and Cheol Seong Hwang Promoted Crystallization of SrTiO3 Thin Film for DRAM Capacitor by Inserting GeOx Buffer Layer in Ru/SrTiO3/RuO2 23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster |
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| 19 |
Heewon Paik, Dae Seon Kwon, Junil Lim, Haengha Seo, Tae Kyun Kim and Cheol Seong Hwang Enhanced Crystallization Behavior by GeOx Insertion in Ru/SrTiO3/RuO2 Capacitor for DRAM 제 30회 반도체학술대회, 강원도 하이원 그랜드호텔(컨벤션타워), 2023년 2월 13-15일, Poster |
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