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24

Bowen Wang, Jinwoo Choi, Hyoung Gyun Kim, Seung Dam Hyun, Hoin Lee, and Cheol Seong Hwang

Influences of Oxygen Source and Substrate Temperature on Growth Mechanism of Atomic Layer Deposited Magnesium Oxide - Using Bis(Cyclopentadienyl)Magnesium Precursor

AVS 21st International Conference on Atomic Layer Deposition, Virtual Meeting, June 27-30, 2021, Oral (On-demand Session)

23

Dae Seon Kwon, Dong Gun Kim, Junil Lim, Tae Kyun Kim, Haengha Seo, and Cheol Seong Hwang*

Improved properties of the atomic layer deposited Ru electrode for dynamic random-access memory capacitor by discrete feeding method

AVS 21st International Conference on Atomic Layer Deposition, Virtual Meeting, June 27-30, 2021, Oral (On-demand Session)

22

Haengha Seo, Dong Gun Kim, Dae Seon Kwon, Junil Lim, Tae Kyun Kim, Heewon Paik, and Cheol Seong Hwang

A comparative study on the crystallization behavior of atomic layer deposited ZrO2 / Y2O3 / ZrO2 dielectric thin films for DRAM capacitors

AVS 21st International Conference on Atomic Layer Deposition, Virtual Meeting, June 27-30, 2021, Oral (On-demand Session)

21

In Soo Lee, Beom Yong Kim, Seung Dam Hyun, Hyeon Woo Park, Yong Bin Lee, Suk Hyun Lee, Minsik Oh, Seung Kyu Ryu, Seung Yong Byun, Doo Sup Shim, and Cheol Seong Hwang

Enhancement of ferroelectric properties of Hf0.5Zr0.5O2 thin films by various metal electrodes

AVS 21st International Conference on Atomic Layer Deposition, Virtual Meeting, June 27-30, 2021, Poster

20

Seung Kyu Ryoo, Beom Yong Kim, Hyeon Woo Park, Yong Bin Lee, Suk Hyun Lee, Minsik Oh, In Soo Lee, Seung Yong Byun, Doo Sup Shim, and Cheol Seong Hwang

Conducting hafnium nitride films fabricated by atomic layer deposition with cleaning step and post deposition annealing in NH3 atmosphere

AVS 21st International Conference on Atomic Layer Deposition, Virtual Meeting, June 27-30, 2021, Poster

19

Chanyoung Yoo, Eui-sang Park, Woohyun Kim, Jeong Woo Jeon, Wonho Choi, Byungwoo Park, Gyuseung Ham, Yoon Kyeung Lee, and Cheol Seong Hwang

Atomic Layer Deposition of GeTe/Sb2Te3 Superlattice for Large-Capacity and Low-Power Phase Change Memory 

AVS 21st International Conference on Atomic Layer Deposition, Virtual Meeting, June 27-30, 2021, Oral (Live Session)

18

Tae Kyun Kim, Dong Gun Kim, Dae Seon Kwon, Junil Lim, Haengha Seo, Heewon Paik, and Cheol Seong Hwang

Atomic Layer Deposition of Y-doped TiO2 Thin Films to Decrease the Leakage Current for DRAM Capacitor Application
AVS 21st International Conference on Atomic Layer Deposition, Virtual Meeting, June 27-30, 2021, Oral (On-demand session)


17

Woohyun Kim, Manick Ha, Chanyoung Yoo, Jeong Woo Jeon, Wonho Choi, Byongwoo Park, Gil Seop Kim, Kyung Seok Woo, Jihun Kim, Yoon Ho Jang, Eui-Sang Park, Yoon Kyeung Lee, and Cheol Seong Hwang

High-Reliable Atomic Layer Deposited N-doped GeSe and Its Leaky-Integrate-and-Fire Neuron Application

AVS 21st International Conference on Atomic Layer Deposition, Virtual Meeting, June 27-30, 2021, Poster

16

Jeong Woo Jeon, Chanyoung Yoo, Eui-sang Park, Woohyun Kim, Wonho Choi, Byungwoo Park, Yoon Kyeung Lee, and Cheol Seong Hwang

Fabrication of Vertical-type Phase-change Memory Leveraging Atomic Layer Deposition

AVS 21st International Conference on Atomic Layer Deposition, Virtual Meeting, June 27-30, 2021, Oral (On-demand Session)

15

Minsik Oh, Hyeon Woo Park, Yong Bin Lee, Suk Hyun Lee, Seung Dam Hyun, In Soo Lee, Seungyong Byun, Beom Yong Kim, Seung Gyu Ryoo, Cheol Seong Hwang

Landau-Khalatnikov Modeling of Polarization Switching in Polycrystalline Ferroelectric-Dielectric Bilayer Thin Films

Electronic Materials and Applications 2021, Virtual, Jan 19-21 (2021), Poster