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51

Suk Woo Lee, Jaehoo Park, Moonju Cho, Sug Hun Hong, Tae Joo Park and Cheol Seong Hwang

Improvements in Electrical and Structural Properties of CVD HfxAlyOz Gate Dielectric Films Grown with N2O Oxidanat

2004 MRS Fall Meeting, Hynes Convention Center & Sheraton Boston Hotel, Boston, MA, USA, November 29–December 3 (2004)

50

Sug Hun Hong, Suk Woo Lee, Jaehoo Park, Moonju Cho, Seong Keun Kim and Cheol Seong Hwang

Characterization of HfO2 and HfxSiyOz Gate Dielectric Films Grown by Chemical Vapor Deposition using TEMAH Precursor and Oxygen

2004 MRS Fall Meeting, Hynes Convention Center & Sheraton Boston Hotel, Boston, MA, USA, November 29–December 3 (2004)

49

S. Y. No, D. Eom, C. S. Hwang and H. J. Kim

Characteristics of Lanthanum Oxide Deposited Using La(iPrCp)3 and H2O

The 1st SNU-UT Student Joint Workshop, Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea, November 18-19 (2004)

48

Oh Seong Kwon, Sang Woon Lee, Min Ha Seo and Cheol Seong Hwang

Chemically Conformal Deposition of SrTiO3 Thin Films by Atomic Layer Deposition Using Conventional Metal Organic Precursors and Remote-Plasma Activated H2O Reactant

The 1st SNU-UT Student Joint Workshop, Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea, November 18-19 (2004)

47

Jin Shi Zhao, Joon Seop Sim, Hyun Joo Lee, Dong-Yeon Park and Cheol Seong Hwang

A study on the deposition behavior of a lead oxide thin film on Pt and Ir substrate by liquid dlivery metal-organic chemical vapor deposition for Pb(Zr,Ti)O3 film growth

The 1st SNU-UT Student Joint Workshop, Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea, November 18-19 (2004)

46

Sang-Woon Lee, Oh Seong Kwon and Cheol Seong Hwang

Annealing effects on the electrical properties of TiO2 thin films grown by atomic layer deposition on p-type silicon substrate

The 1st SNU-UT Student Joint Workshop, Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea, November 18-19 (2004)

 

45

Kyung-Min Kim, Byung Joon Choi, Seong Keun Kim and Cheol Seong Hwang

Fabrication of a metal-oxide-semiconductor type micro capacitive tip array using SiO2 or HfO2 gate insulators

The 1st SNU-UT Student Joint Workshop, Inter-University Semiconductor Research Center, Seoul National University, Seoul, Korea, November 18-19 (2004)

44

Joon Seop Sim, Jin Shi Zhao, Hyun Ju Lee, Cheol Seong Hwang

Deposition Characterization of Lead Oxide Thin Film on Pt and Ir Substrates by Liquid Delivery Metal-Organic Chemical Vapor Deposition

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