| 11 |
Y Min, Y. J. Cho, J. Han, W. D. Kim, and C. S. Hwang Characterization and Electrical Properties of Bi1-x-yTixSiyOz(BTSO) Thin Films by Atomic Layer Deposition The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster
|
 |
| 10 |
Oh Seong Kwon, Moon Ju Cho and Cheol Seong Hwang, and Jae Hack Jeong Atomic Layer Depositon of SrTiO3 Films Having a High Thickness- and cation - composition Conformality Over a Severe Contact Hole Structure The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004)
|
|
| 9 |
S. K. Kim and C. S. Hwang Variations in the Electrical Properties of Atomic-Layer-Deposited Al2O3 Thin Films by Various Pre-Oxidation Treatments of the Si Substrates The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004)
|
|
| 8 |
M. Cho, J. Park, H. B. Park, S. W. Lee, C. S. Hwang, J. Jeong, and G. H. Jang High-K Properties of Atomic-Layer-Deposited HfO2 Films Using a Nitrogen-Containing Hf[N(CH3)2]4 Precursor and H2O or O3 Oxidant The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004)
|
|
| 7 |
Cheol Seong Hwang High-k capacitor and recent DRAM technology; Scaling of DRAM MOSFETs and Capacitors 16th International Symposium on Integrated Ferroelectrics, Gyeongju, Korea, April 5-9 (2004), Tutorial lecture
|
|
| 6 |
이석우, 박재후, 조문주, 박홍배, 박태주, 황철성 Analysis of the nitrogen incorporation by N2O oxidant on HfxAlyOz gate dielectric films grown by chemical vapor deposition using a single molecular precursor 제11회 한국반도체학술대회, 무주리조트 호텔티롤, 2004년 2월 19일-20일, Poster
|
|
| 5 |
김성근, 황철성 The study on the electrical properties of Al2O3 thin films on O3 oxidation of Si substrate 제11회 한국반도체학술대회, 무주리조트 호텔티롤, 2004년 2월 19일-20일, Poster
|
|
| 4 |
최병준, 김경민, 황철성 Fabrication of the Capacitive Probe and Study on the C-V characterization 제11회 한국반도체학술대회, 무주리조트 호텔티롤, 2004년 2월 19일-20일
|
|
| 3 |
조금석, 박동연, 황철성 새로운 전구체를 사용한 Pb(Zr, Ti)O3 박막의 저온 유기화학 증착 제11회 한국반도체학술대회, 무주리조트 호텔티롤, 2004년 2월 19일-20일
|
|
| 2 |
권오성, 조문주, 황철성, 정재학 Atomic layer doposition of SrTiO3 films with remote-plasma activated H2O and conventional metal organic precursors 제11회 한국반도체학술대회, 무주리조트 호텔티롤, 2004년 2월 19일-20일
|
|
HOME > Publication > Conference
