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Gyu Weon Hwang, Wan Don Kim, Cheol Seong Hwang, Yo-Sep Min, Young Jin Cho, Jeong-Hee Han Atomic Layer Deposition of Bi2Ti2O7 Thin Films for Capacitor Dielectric Applications Çѱ¹¼¼¶ó¹ÍÇÐȸ 2004 Ã߰迬±¸ ¹ßǥȸ, ±º»ê´ëÇб³, 2004³â 10¿ù 15ÀÏ-16ÀÏ
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Cheol Seong Hwang Fabrication of a MOS type micro capacitive tip array using SiO2 or HfO2 gate insulators The 4th Innovative Mass Storage Technologies Workshop, Dorint Aachen Quellenhof Hotel, Aachen, Germany, September 28-29 (2004)
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39 |
Sang Yeol Kang, Beom Seok Kim, Sang Yong No, Jung-Hae Choi, Cheol Seong Hwang and Hyeong Joon Kim Thermal Stability of Pt-doped Ru Films Prepared by Chemical Vapor Deposition as Electrodes of the DRAM Capacitors The 5th Korea-Japan Conference on Ferroelectricity, Hoam Convention Center, Seoul National University, Seoul, Korea, August 18-21 (2004), Poster
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Wan-Don Kim, Gyu Weon Hwang, Seong Keun Kim, Oh Seong Kwon, Doo Seok Jeong and Cheol Seong Hwang Atomic Layer Deposition of Titanium Based Oxide (TiO2, Bi2Ti2O7) Thin Films for MIM Capacitor of Next Generation Memory Devices The 5th Korea-Japan Conference on Ferroelectricity, Hoam Convention Center, Seoul National University, Seoul, Korea, August 18-21 (2004), Poster
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Seong Keun Kim, Wan Don Kim and Cheol Seong Hwang Atomic Layer Deposition of Titanium Oxide Thin Films Using O3 for MIM Capacitor of Next Generation Memory Devices The 5th Korea-Japan Conference on Ferroelectricity, Hoam Convention Center, Seoul National University, Seoul, Korea, August 18-21 (2004), Poster
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Jin Shi-Zhao, Joon Seop Sim, Dong-Yeon Park, Hyun Ju Lee and Cheol Seong Hwang Deposition Characteristics of Pb(ZrxTi1-x)O3 and PbO Thin Films on Pt and Ir Thin Film Substrates by Liquid Delivery Metal-organic Chemical Vapor Deposition The 5th Korea-Japan Conference on Ferroelectricity, Hoam Convention Center, Seoul National University, Seoul, Korea, August 18-21 (2004), Poster
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Joon Seop Sim, Jin Shi-Zhao, Dong-Yeon Park, Hyun Ju Lee and Cheol Seong Hwang The Effects of Zirconium Concentration on Self Regulation Mechanism for Pb(ZrxTi1-x)O3 and PbTiO3 Thin Films Deposited by Liquid-Delivery Metal-organic Chemical Vapor Deposition The 5th Korea-Japan Conference on Ferroelectricity, Hoam Convention Center, Seoul National University, Seoul, Korea, August 18-21 (2004), Poster
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Tae Joo Park, Moonju Cho, Seong Keun Kim, Jaehoo Park, Seok Woo Lee, Sug Hun Hong and Cheol Seong Hwang Electrical and Structural Properties of High-k Dielecric Films on SixGe1-x Substrates with Pre- and Post-treatments Using N2O and NH3 The 5th Korea-Japan Conference on Ferroelectricity, Hoam Convention Center, Seoul National University, Seoul, Korea, August 18-21 (2004), Poster
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Moonju Cho, Jaehoo Park, Seong Keun Kim, Suk Woo Lee, Sug Hun Kim, Tae Joo Park and Cheol Seong Hwang High-k Properties of Atomic-Layer-Deposited HfO2 Films Using a Nitrogen-containing Hf[N(CH3)2]4 Precursor and H2O or O3 Oxidant The 5th Korea-Japan Conference on Ferroelectricity, Hoam Convention Center, Seoul National University, Seoul, Korea, August 18-21 (2004), Poster
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Jaehoo Park, Moonju Cho, Suk Woo Lee, Tae Joo Park, Sug Hun Hong, Doo Seok Jeong and Cheol Seong Hwang Hot Carrier Effect in Self-aligned Poly-Si Gate n-type Field Effect Transistors with HfO2 Gate Dielectrics The 5th Korea-Japan Conference on Ferroelectricity, Hoam Convention Center, Seoul National University, Seoul, Korea, August 18-21 (2004)
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