31 |
Woo Young Park, Cheol Seong Hwang and Kun Ho Ahn Variations in Phase Transition of Sputtered (Ba, Sr)TiO3 Thin Films with the Varying Film Thickness Having Pt or IrO2 Electrodes The 5th Korea-Japan Conference on Ferroelectricity, Hoam Convention Center, Seoul National University, Seoul, Korea, August 18-21 (2004)
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30 |
Yo-Sep Min, Young Jin Cho, Jeong-Hee Han, Igor P. Asanov, Wan Don Kim and Cheol Seong Hwang Characterization of Bi1-x-yTixSiyOz(BTSO) Thin Films Grown by ALD ALD 2004, University of Helsinki, Finland, August 16-18 (2004), Poster
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29 |
Wan-Don Kim, Gyu Weon Hwang, Seong Keun Kim, Oh Seong Kwon, Doo Seok Jeong, Cheol Seong Hwang, Yo-Sep Min, Young Jin Ch, and Jeong-Hee Han Atomic Layer Deposition of Titanium Dioxide Thin Films for MIM Capacitors of Next Generation Memory Devices ALD 2004, University of Helsinki, Finland, August 16-18 (2004), Poster
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28 |
Sang Woon Lee, Oh Seong Kwon, Minha Seo and Cheol Seong Hwang Film Thickness Dependent Atomic-Layer-Deposition Behaviors of TiO2 Thin Films on Si Substrate ALD 2004, University of Helsinki, Finland, August 16-18 (2004), Poster
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27 |
Oh Seong Kwon, Sang Woon Lee, Moonju Cho, Minha Seo and Cheol Seong Hwang Atomic Layer Deposition of SrTiO3 Films Having a High Thickness- and Cation- Composition Conformality Over a Severe Contact Hole Structure ALD 2004, University of Helsinki, Finland, August 16-18 (2004)
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26 |
Woo Young Park, Cheol Seong Hwang, and Kun Ho Ahn Variations in Critical Temperature and Phase Transformation of Sputtered (Ba,Sr)TiO3 Thin Films with the Varying Film Thickness Having Pt or IrO2 Electrodes The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004)
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25 |
C. H. Lee, J. H. Choi, C. S. Hwang, and H. J. Kim Electrical Characteristics Investigation of n+ Polycrystalline-Silicon/Stacked High-k Gate Dielectric Films with HfO2 and Al2O3 The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster
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24 |
S. W. Lee, S. H. Hong, M. Cho, J. Park, T. J. Park, and C. S. Hwang Chemical Vapor Deposition of High-k Hf-Silicate for High Performance CMOS Application The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster
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23 |
J. Yang, H. Kim, D. Lee, S. H. Kim, J. Ha, C. S. Hwang, and D. Park Fabrication of Resistance Temperature Detection Wafer Uisng Giant-Grained Platinum Thin Films Deposited on Si Wafer The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster
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22 |
T. J. Park, S. K. Kim, M. Cho, J. Park, H. B. Park, S. W. Lee, and C. S. Hwang Comparison of Electrical and Structural Properties of High-K Dielectric Films on SixGe1-x Substrates The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster
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