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Woo Young Park, Cheol Seong Hwang and Kun Ho Ahn

Variations in Phase Transition of Sputtered (Ba, Sr)TiO3 Thin Films with the Varying Film Thickness Having Pt or IrO2 Electrodes

The 5th Korea-Japan Conference on Ferroelectricity, Hoam Convention Center, Seoul National University, Seoul, Korea, August 18-21 (2004)

 

30

Yo-Sep Min, Young Jin Cho, Jeong-Hee Han, Igor P. Asanov, Wan Don Kim and Cheol Seong Hwang

Characterization of Bi1-x-yTixSiyOz(BTSO) Thin Films Grown by ALD

ALD 2004, University of Helsinki, Finland, August 16-18 (2004), Poster

29

Wan-Don Kim, Gyu Weon Hwang, Seong Keun Kim, Oh Seong Kwon, Doo Seok Jeong, Cheol Seong Hwang, Yo-Sep Min, Young Jin Ch, and Jeong-Hee Han

Atomic Layer Deposition of Titanium Dioxide Thin Films for MIM Capacitors of Next Generation Memory Devices

ALD 2004, University of Helsinki, Finland, August 16-18 (2004), Poster

28

Sang Woon Lee, Oh Seong Kwon, Minha Seo and Cheol Seong Hwang

Film Thickness Dependent Atomic-Layer-Deposition Behaviors of TiO2 Thin Films on Si Substrate

ALD 2004, University of Helsinki, Finland, August 16-18 (2004), Poster

27

Oh Seong Kwon, Sang Woon Lee, Moonju Cho, Minha Seo and Cheol Seong Hwang

Atomic Layer Deposition of SrTiO3 Films Having a High Thickness- and Cation- Composition Conformality Over a Severe Contact Hole Structure

ALD 2004, University of Helsinki, Finland, August 16-18 (2004)

26

 Woo Young Park, Cheol Seong Hwang, and Kun Ho Ahn

Variations in Critical Temperature and Phase Transformation of Sputtered (Ba,Sr)TiO3 Thin Films with the Varying Film Thickness Having Pt or IrO2 Electrodes

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004)

25

C. H. Lee, J. H. Choi, C. S. Hwang, and H. J. Kim

Electrical Characteristics Investigation of n+ Polycrystalline-Silicon/Stacked High-k Gate Dielectric Films with HfO2 and Al2O3

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

24

 S. W. Lee, S. H. Hong, M. Cho, J. Park, T. J. Park, and C. S. Hwang

Chemical Vapor Deposition of High-k Hf-Silicate for High Performance CMOS Application

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

23

J. Yang, H. Kim, D. Lee, S. H. Kim, J. Ha, C. S. Hwang, and D. Park

Fabrication of Resistance Temperature Detection Wafer Uisng Giant-Grained Platinum Thin Films Deposited on Si Wafer

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

22

T. J. Park, S. K. Kim, M. Cho, J. Park, H. B. Park, S. W. Lee, and C. S. Hwang

Comparison of Electrical and Structural Properties of High-K Dielectric Films on SixGe1-x Substrates

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster