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21

Dong-Yeon Park, Hyun-Jin Kim, Dong-Su Lee, Seung Hyun Kim, Jung-Hae Choi, Sang Woon Lee, and Cheol Seong Hwang

Orientation Control and Characterizaton of Giant Grains of Reactively Sputtered Platinum Films on Silicon and Sapphire Substrates

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

20

JinShi Zhao, Dong-Yeon Park, Mathias Schindler, and Cheol Seong Hwang

Comparison of the Ferroelectric Reliability Properties of Pb(ZrxTi1-x)O3 Thin Films with Different Bottom Electrodes Grown by Liquid Delivery Metal-Organic Chemical Vapor Deposition

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

19

Jung-Hoon Yeom, Seung-Hyun Kim, Chang Young Koo, Jong-Hyeon Cheon, Jowoong Ha, and Cheol Seong Hwang

Charge Retention Characteristics of PZT Thin Films for High Density FeRAM Devices

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

18

Kyung Min Kim, Byung Joon Choi, and Cheol Seong Hwang

Fabrication of the Capacitive Probe and Study on the C-V Characterization

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

17 Jaehoo Park, Chihoon Lee, Moonju Cho, Hong Bae Park, Jihoon Choi, Seok Woo Lee, Tae Joo Park, and Cheol Seong Hwang

Fabrication and performance of self-aligned poly-Si gate n-type field effect transistors with HfO2 gate dielectrics

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

16

Dail Eom, In Sang Jeon, Sang Yong No, Cheol Seong Hwang, and Hyeong Joon Kim

The Effects in Structures and Electrical Conduction Mechanisms of Chemical Vapor Deposited Ta2O5 Thin Films by Annealing Under O3 Atmosphere with Ultra-Violet Light Radiation

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

15

S. Y. No, D. Eom, C. S. Hwang, and H. J. Kim

Effects of UV Radiation During Atomic Layer Deposition on the Properties of Al2O3 Thin Films

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

14

S. Y. Kang, C. S. Hwang, and H. J. Kim

Ru and Pt-Doped Ru Thin Films Prepared by Chemical Vapor Depositon as Bottom Electrodes for Memory Applications

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

13

D. S. Jeong, M. Cho, H. B. Park, and C. S. Hwang

Leakage Current Characteristics of Atomic Layer Deposited HfO2 Thin Films Using Different Hf-Precursor and Oxidant

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster

12

W. D. Kim, O. S. Kwon, S. K. Kim, D. S. Jeong, and C. S. Hwang

Atomic Layer Depositoin of Titanium Dioxide (TiO2) Thin Films for MIM Capacitor of Next Generation Memory Devices

The 16th International Symposium on Integrated Ferroelectrics, Hotel Hyundai Gyeongju, Bomun Lake Resort, Gyeongju, Korea, April 5-8 (2004), Poster