33 |
Jae Hyuck Jang, Jeong Hwan Kim, Hyung-Suk Jung, Sang Young Lee, Hyo Kyeom Kim, Miyoung Kim, and Cheol Seong Hwang Deposition characteristic and structure analysis of TaCxNy film with new Ta precursor (ChanTAL)deposited by PEALD ALD 2010, Seoul, June 21-23 (2010), Poster
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32 |
Taeyong Eom, Seol Choi, Byoung Joon Choi, Min Hwan Lee, Sang Ho Ra, Woongkyu Lee, Deok-Yong Cho, Moo-Sung Kim, Manchao Xiao, and Cheol Seong Hwang Thermal atomic layer deposition of GeTe2-Sb2Te3 films for the confined cell structured phase change memory ALD 2010, Seoul, June 21-23 (2010), Oral
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31 |
Sang Woon Lee, Jeong Hwan Han, Seong Keun Kim, Sora Han, Cheol Seong Hwang, Christian Dussarrat, and Julien Gatineau SrTiO3 Thin Films with Highly Enhanced Atomic Layer Deposition Rate for Ultrahigh Density Capacitors ALD 2010, Seoul, June 21-23 (2010), Oral
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30 |
Hyo Kyeom Kim, Hyung-Suk Jung, Jae Hyuck Jang, Jeong Hwan Kim, Sang Young Lee, and Cheol Seong Hwang Systematic study of ALD grown HfSiO gate dielectrics with various Hf/Hf+Si Ratios ALD 2010, Seoul, June 21-23 (2010), Oral
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29 |
Seong Keun Kim, Gyu-Jin Choi, Minha Seo, Sang Woon Lee, Jeong Hwan Han and Cheol Seong Hwang TiO2 AND Al doped TiO2 films grown by atomic layer deposition for next generation DRAM capacitor ISIF 2010, Conrad San Juan Condado Plaza, Puerto Rico, June 13-16 (2010)
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28 |
Seol Choi, Byung Joon Choi, Taeyong Eom, Jae Hyuck Jang, Woong Kyu Lee and Cheol Seong Hwang Growth and crystallization behaviors of Ge doped Sb-Te thin films deposited by a combined plasma enhanced chemical vapor and atomic layer depositions ISIF 2010, Conrad San Juan Condado Plaza, Puerto Rico, June 13-16 (2010), Oral
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27 |
Joohwi Lee, Jung-Hae Choi, Seung-Cheol Lee, Cheol Seong Hwang First-principles calculations on the formation and migration of the vacancy in strained Ge 2010 ´ëÇѱݼÓÀç·áÇÐȸ Ãá°èÇмú´ëȸ, Çö´ë¼º¿ì¸®Á¶Æ®, April 22-23 (2010), Oral
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26 |
Taeyong Eom, Seol Choi, Byung Joon Choi, Sangho Rha, Woongkyu Lee, Cheol Seong Hwang and Moo Seong Kim Atomic Layer Deposition of (GeTe2)x(Sb2Te3)y Films Using Novel Precursors for Phase Change Memory MRS spring meeting 2010, San Francisco Marriott, April 6 (2010), Poster
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25 |
Seol Choi, Byung Joon Choi, Taeyong Eom, Jae Hyuck Jang, Woongkyu Lee and Cheol Seong Hwang Growth and Crystallization Behavior of Ge Doped SbxTey Thin Films Deposited by a Plasma-enhanced CVD MRS spring meeting 2010, San Francisco Marriott, April 6 (2010), Poster
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24 |
Gun Hwan Kim, Jun yeong Seok, Kyung Min Kim, Min Hwan Lee and Cheol Seong Hwang Influence of Electrode Material on the Interconnect Line Resistance and Performance of Resistive Cross Bar Array Using TiO2 Thin Film MRS spring meeting 2010, San Francisco Marriott, April 7 (2010), Poster
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