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26

Dail Eom, Jaeyoung Heo, Seok-Jun Won, Cheol Seong Hwang, and Hyeong Joon Kim

Atomic layer deposition of La-based oxide thin film using La[N(SiMe3)2]3 precursor by a liquid injection system

ALD 2008, Bruges, Belgium, June 29 - July 2 (2008)

25

Gyu-Jin Choi, Sang Young Lee, Woo Young Park, Seong Keun Kim, and Cheol Seong Hwang

Atomic layer deposition of TiO2 thin films on Ru/TiN electrode for dynamic random access memory applications

ALD 2008, Bruges, Belgium, June 29 - July 2 (2008)

24

S. Hoffmann-Eifert, T. Watanabe, S.K. Kim, C.S. Hwang, R. Waser

Liquid Injection Atomic Layer Deposition of Perovskite-type Multi-component Oxide Thin Films for Three Dimensional Ferroelectric Capacitor Structures

ALD 2008, Bruges, Belgium, June 29 - July 2 (2008)

23

Seok-Jun Won, Jaeyeong Heo, Dail Eom, Sang Hyun Park, Cheol Seong Hwang, Hyeong Joon Kim, Jung-Myn Park, Weon-Hong Kim, Ju-Youn Kim, Min-Woo Song, Moon-Han Park, Nae-In Lee, Ho-Kyu Kang

Deposition rate enhancement effect of nitrous oxide plasma in plasma-enhanced atomic layer deposition

ALD 2008, Bruges, Belgium, June 29 - July 2 (2008)

22

Jaeyeong Heo, Seok-Jun Won, Sang Young Lee, Dail Eom, Sang Hyun Park, Cheol Seong Hwang, Hyeong Joon Kim

The role of surface functional groups of SiOC:H low-k films on the nucleation of atomic-layerdeposited ruthenium

ALD 2008, Bruges, Belgium, June 29 - July 2 (2008)

21

Cheol Seong Hwang, Byung Joon Choi, Seol Choi, Taeyong Eom, Kyung Min Kim, Yong Cheol Shin, Yoon Jung Kim, Hae Chan Park, Suk Kyoung Hong

Plasma enhanced atomic layer deposition of Ge2Sb2Te5 films and its applications to high speed phase change memory

ALD 2008, Bruges, Belgium, June 29 - July 2 (2008)

20

Minha Seo, Seong Keun Kim, Gyu-Jin Choi, Cheol Seong Hwang

Electrical properties of HfO2/TiO2 stacked films grown by atomic layer deposition

WoDiM 2008, Bad Saarow, Berlin, Germany, June 23-25 (2008)

19

Woo Young Park and Cheol Seong Hwang, John D. Baniecki, Masatoshi Ishii, Kazuaki Kurihara and Kazunori Yamanaka

Unusual Thickness Dependence of Permittivity and Elastic Strain in Sc Modified Epitaxial (Ba,Sr)TiO3 Thin Films

ISIF 2008, Singapore, June 9-12 (2008)

18

Gun Hwan Kim, Hyun Ju Lee and Cheol Seong Hwang

Analysis of Imprinted Hysteresis Loop of the Ferroelectric Pt/Pb(Zr,Ti)O3/Pt Thin Film Capacitors

ISIF 2008, Singapore, June 9-12 (2008)

17

CHOI Seol, CHOI Byung Joon, SHIN Yong Cheol, KIM Kyung Min, and HWANG Cheol Seong

Investigation of the resistance switching phenomena in the Ge0.5Te0.5 thin films with Ag electrode

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