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22

Sang Yeol Kang, Ha Jin Lim, Cheol Seong Hwang

Metallorganic chemical vapor deposition of Ru films using cyclopentadienyl-propylcyclopentadienlylruthenium(II) and oxygen

Á¦3ȸ °íÀ¯Àüü ¹× °­À¯Àüü ¼ÒÀÚ/Àç·á workshop, ¼­¿ï´ëÇб³, 2001³â 12¿ù 17ÀÏ

21

ÀÓÇÏÁø, °­»ó¿­, Ȳö¼º, ±èÇüÁØ

Ru ¹Ú¸·ÀÇ ÀÀ¿ª °Åµ¿ ºÐ¼® ¹× °³¼±¿¡ °üÇÑ ¿¬±¸

Á¦3ȸ °íÀ¯Àüü ¹× °­À¯Àüü ¼ÒÀÚ/Àç·á workshop, ¼­¿ï´ëÇб³, 2001³â 12¿ù 17ÀÏ

20

³ë»ó¿ë, Ȳö¼º, ±èÇüÁØ

MOCVD¹ý¿¡ ÀÇÇÑ TiO2 ¹Ú¸·ÀÇ ÁõÂø ½Ã °¡½º°ü ¿Âµµ º¯È­°¡ ÁõÂø°Åµ¿¿¡ ¹ÌÄ¡´Â ¿µÇâ

Á¦3ȸ °íÀ¯Àüü ¹× °­À¯Àüü ¼ÒÀÚ/Àç·á workshop, ¼­¿ï´ëÇб³, 2001³â 12¿ù 17ÀÏ

 

19

Ȳö¼º

Metal-organic chemical vapor deposition of very thin films for high density FeRAMs

Á¦3ȸ °íÀ¯Àüü ¹× °­À¯Àüü ¼ÒÀÚ/Àç·á workshop, ¼­¿ï´ëÇб³, 2001³â 12¿ù 17ÀÏ

18

Seung-Hyun Kim, J. Ha, S.K. Hong, Cheol Seong Hwang

A critical comparison of degradation phenomena in PZT, SBT and BLT thin films for high density FeRAM devices

1st International Meeting on Ferroelectric Random Access Memories, Nov 19-21 (2001), Poster

17

Hye Ryoung Kim, Seehwa Jeong, Chung Bae Jeon, Oh Seong Kwon, Cheol Seong Hwang, Young Ki Han, Doo Young Yang, Ki Young Oh

Metalorganic chemical vapor deposition of very thin Pb(Zr,Ti)O3 thin films at low temperatures for high density ferroelectric memory applications

1st International Meeting on Ferroelectric Random Access Memories, Nov 19-21 (2001), Poster

16

Cheol Seong Hwang, Seung-Hyun Kim, Suk-Kyoung Hong

Fatigue and Imprint of integrated PZT and BLT capacitors for high density FeRAMs

1st International Meeting on Ferroelectric Random Access Memories, November 19-21 (2001)

15

¹Úº´°Ç, ¹ÚÀçÈÄ, Á¶¹®ÁÖ, Ȳö¼º, ±èµ¿Çö, ÇÑ¿µ±â, ¿À±â¿µ, ¾çµÎ¿µ

Si ±âÆÇ À§¿¡¼­ CVD¸¦ ÀÌ¿ëÇÑ gate dielectric ¿ë HfO2 ¹Ú¸·ÀÇ ÁõÂø°ú ºÐ¼®

Çѱ¹Àç·áÇÐȸ Ãß°èÇмú¹ßÇ¥,°í·Á´ëÇб³, 2001³â 11¿ù 2ÀÏ

14

±è¼º±Ù, ±Ç¿À¼º, Ȳö¼º

´Ü¿øÀÚÁõÂø¹ýÀ» ÀÌ¿ëÇÑ SrTiO3 ¹Ú¸·ÀÇ ÁõÂø ¹× Ư¼º Æò°¡

Çѱ¹Àç·áÇÐȸ Ãß°èÇмú¹ßÇ¥,°í·Á´ëÇб³, 2001³â 11¿ù 2ÀÏ

13

ÀÓÁöÀº, Á¶±Ý¼®, Á¤½ÃÈ­, Ȳö¼º, ±è½ÂÇö

sol-gel¹ýÀ» ÀÌ¿ëÇÑ Pb(Zr0.52, Ti0.48)O3 ¹Ú¸·ÀÇ ÇϺΠPt Àü±Ø°ú »óºÎ PtOx Àü±Ø¿¡ µû¸¥ ÇÇ·ÎÇö»ó

Çѱ¹Àç·áÇÐȸ Ãß°èÇмú¹ßÇ¥,°í·Á´ëÇб³, 2001³â 11¿ù 2ÀÏ