22 |
Sang Yeol Kang, Ha Jin Lim, Cheol Seong Hwang Metallorganic chemical vapor deposition of Ru films using cyclopentadienyl-propylcyclopentadienlylruthenium(II) and oxygen Á¦3ȸ °íÀ¯Àüü ¹× °À¯Àüü ¼ÒÀÚ/Àç·á workshop, ¼¿ï´ëÇб³, 2001³â 12¿ù 17ÀÏ
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21 |
ÀÓÇÏÁø, °»ó¿, Ȳö¼º, ±èÇüÁØ Ru ¹Ú¸·ÀÇ ÀÀ¿ª °Åµ¿ ºÐ¼® ¹× °³¼±¿¡ °üÇÑ ¿¬±¸ Á¦3ȸ °íÀ¯Àüü ¹× °À¯Àüü ¼ÒÀÚ/Àç·á workshop, ¼¿ï´ëÇб³, 2001³â 12¿ù 17ÀÏ
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20 |
³ë»ó¿ë, Ȳö¼º, ±èÇüÁØ MOCVD¹ý¿¡ ÀÇÇÑ TiO2 ¹Ú¸·ÀÇ ÁõÂø ½Ã °¡½º°ü ¿Âµµ º¯È°¡ ÁõÂø°Åµ¿¿¡ ¹ÌÄ¡´Â ¿µÇâ Á¦3ȸ °íÀ¯Àüü ¹× °À¯Àüü ¼ÒÀÚ/Àç·á workshop, ¼¿ï´ëÇб³, 2001³â 12¿ù 17ÀÏ
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19 |
Ȳö¼º Metal-organic chemical vapor deposition of very thin films for high density FeRAMs Á¦3ȸ °íÀ¯Àüü ¹× °À¯Àüü ¼ÒÀÚ/Àç·á workshop, ¼¿ï´ëÇб³, 2001³â 12¿ù 17ÀÏ
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18 |
Seung-Hyun Kim, J. Ha, S.K. Hong, Cheol Seong Hwang A critical comparison of degradation phenomena in PZT, SBT and BLT thin films for high density FeRAM devices 1st International Meeting on Ferroelectric Random Access Memories, Nov 19-21 (2001), Poster |
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17 |
Hye Ryoung Kim, Seehwa Jeong, Chung Bae Jeon, Oh Seong Kwon, Cheol Seong Hwang, Young Ki Han, Doo Young Yang, Ki Young Oh Metalorganic chemical vapor deposition of very thin Pb(Zr,Ti)O3 thin films at low temperatures for high density ferroelectric memory applications 1st International Meeting on Ferroelectric Random Access Memories, Nov 19-21 (2001), Poster
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16 |
Cheol Seong Hwang, Seung-Hyun Kim, Suk-Kyoung Hong Fatigue and Imprint of integrated PZT and BLT capacitors for high density FeRAMs 1st International Meeting on Ferroelectric Random Access Memories, November 19-21 (2001)
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15 |
¹Úº´°Ç, ¹ÚÀçÈÄ, Á¶¹®ÁÖ, Ȳö¼º, ±èµ¿Çö, ÇÑ¿µ±â, ¿À±â¿µ, ¾çµÎ¿µ Si ±âÆÇ À§¿¡¼ CVD¸¦ ÀÌ¿ëÇÑ gate dielectric ¿ë HfO2 ¹Ú¸·ÀÇ ÁõÂø°ú ºÐ¼® Çѱ¹Àç·áÇÐȸ Ãß°èÇмú¹ßÇ¥,°í·Á´ëÇб³, 2001³â 11¿ù 2ÀÏ
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14 |
±è¼º±Ù, ±Ç¿À¼º, Ȳö¼º ´Ü¿øÀÚÁõÂø¹ýÀ» ÀÌ¿ëÇÑ SrTiO3 ¹Ú¸·ÀÇ ÁõÂø ¹× Ư¼º Æò°¡ Çѱ¹Àç·áÇÐȸ Ãß°èÇмú¹ßÇ¥,°í·Á´ëÇб³, 2001³â 11¿ù 2ÀÏ
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13 |
ÀÓÁöÀº, Á¶±Ý¼®, Á¤½ÃÈ, Ȳö¼º, ±è½ÂÇö sol-gel¹ýÀ» ÀÌ¿ëÇÑ Pb(Zr0.52, Ti0.48)O3 ¹Ú¸·ÀÇ ÇϺΠPt Àü±Ø°ú »óºÎ PtOx Àü±Ø¿¡ µû¸¥ ÇÇ·ÎÇö»ó Çѱ¹Àç·áÇÐȸ Ãß°èÇмú¹ßÇ¥,°í·Á´ëÇб³, 2001³â 11¿ù 2ÀÏ
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