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Facility
[Deposition] Sputter system for Oxide semiconductor
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2016-03-28 17:00:14
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¿ëµµ : Oxide Semiconductor ÁõÂø¿ë
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Oxide semiconductor ¹× Àü±Ø ÁõÂø,
RF 1ea, DC 1ea,
Sputter target : 4¡± 1ea, 3¡± 2ea
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Sputter system for Pt & W
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Sputter system for IGZO, ZnO & ZTO