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[Furnace] Conventional Vertical Furnace
  • 글쓴이 권대선
  • 작성일 2016-03-25 17:48:40
  • 조회수 2645




  • 제작회사 : Labmade
  • 모델명 : 
  • 용도 : 박막열처리
  • 특징 :
    - Three chambers available (BST, SBT, PZT)
    - Four gases available (O2/N2/O2+N2/N2+H2)
    - Vacuum available by Rotary pump (W2V40, Woosung Automa)
    - Maximum Gas flow rate guaranteed ( BST,PZT-10000sccm , SBT-1500sccm)
    - Maximum Temperature guaranteed ( BST-800 degrees , SBT – 1000 degrees )
    - 50mm-diameter plate for sample
  • 담당자 : 강석인, 김태균
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    이전글 Rapid thermal process(non O2)
    다음글 Sputter system