Chanyoung Yoo‚ Wonho Choi‚ Jeong Woo Jeon‚ Byongwoo Park‚ Gwangsik Jeon‚ Sangmin Jeon‚ Cheol Seong Hwang

Wafer-Scale Controlled Growth of Two-Dimensional Metal Dichalcogenides Through Atomic Layer Deposition and Top-Bottom Epitaxy

23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Oral

Seung Kyu Ryoo, Kyung Do Kim, and Cheol Seong Hwang^*

^{Unveiling the Impact of Elevated Temperature Annealing on AlScN Films under Nitrogen and Ammonia Ambient Conditions}

^{2023 IEEE ISAF-ISIF-PFM, Cleveland, Ohio, USA, July 23 to 27, Poster}

Kyung Do Kim, Yong Bin Lee, Suk Hyun Lee, In Soo Lee, Seungyong Byun, Jae Hoon Lee, Hani Kim, Hyeon Woo Park, and Cheol Seong Hwang

Origin of fatigue phenomenon in aluminum scandium nitride

2023 IEEE ISAF-ISIF-PFM, Cleveland, Ohio, USA, July 23 to 27, Poster

SeongJae Shin, Seung Yong Byun, Hani Kim, and Cheol Seong Hwang^*

^{The atomic layer deposited 5nm Ferroelectric/Antiferroelectric hafnium zirconium oxide using heteroleptic Hf/Zr precursor}

2023 IEEE ISAF-ISIF-PFM, Cleveland, Ohio, USA, July 23 to 27, Poster

Yu Kyung Park, Hae Won Song, Tae Kyun Kim, Junil Lim, Haengha Seo, Heewon Paik, Jonghoon Shin, and Cheol Seong Hwang

Magnesium-doping in TiO₂ Dielectric Films for DRAM Capacitor Applications

23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster

Youngsin Kim, Junil Lim, Dae Seon Kwon, Keonuk Lee, Yukyung Park, Haengha Seo, Tae Kyun Kim, Heewon Paik, Haewon Song, Jong Hoon Shin, and Cheol Seong Hwang

Growth and crystallization of SrRuO₃ films by atomic layer deposition depending on the substrates

23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster

Haengha Seo, Jonghoon Shin, Junil Lim, Tae Kyun Kim, Heewon Paik, and Cheol Seong Hwang

Non-Diffusive Phenomenon of Al and Y Doping in the ZrO₂/Al₂O₃ and ZrO₂/Y₂O₃ Bilayer Thin-Films and Its Influence on the Field-Induced Ferroelectric Properties

23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster

Tae Kyun Kim, Dae Seon Kwon, Junil Lim, Haengha Seo, Heewon Paik, Jonghoon Shin, and Cheol Seong Hwang

Yttrium-doping in TiO₂ Films for DRAM Capacitor Applications

23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster

Junil Lim, Kun Hee Ye, Dae Seon Kwon, Haengha Seo, Tae Kyun Kim, Heewon Paik, Haewon Song, Jong Hoon Shin, Jung-Hae Choi and Cheol Seong Hwang

Improved Properties of the SrRuO₃ Electrode by Controlling Annealing Conditions and Adopting Al-doping

23rd International Conference on Atomic Layer Deposition, Bellevue, USA, July 23 to 26, Poster