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Total Papers : 796    Total Conferences : 1126
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B.K. Park, J. Park, C.S. Hwang, Y.K. Han, D.H. Kim, D.Y. Yang, and K.Y. Oh

Electrical properties of Hafnium oxide thin films deposited by a chemical vapor deposition for gate dielectric application

13th International Symposium on Integrated Ferroelectrics, Colorado Springs, USA, March 11-14 (2001)
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J. Park, B.K. Park, C.S. Hwang, Y.K. Han, D.H. Kim, D.Y. Yang, and K.Y. Oh

Deposition of HfO2 thin films for gate dielectric layer

13th International Symposium on Integrated Ferroelectrics, Colorado Springs, USA, March 11-14 (2001), Poster