김지훈, 황철성

고주파 스퍼터링 방법으로 증착한 (Ba,Sr)TiOxNy 박막의 특성 분석

한국재료학회, 공주대학교, 2001년 5월 19일, Poster

정시화, 김혜령, 조금석, 임지은, 황철성, 양두영, 오기영

액체수송 유기금속 화학증착법(LDS-MOCVD)에 의한 Pb(Zr_xTi_1-x)O₃ 박막의 저온 (450-500℃) 증착 및 특성분석

한국재료학회, 공주대학교, 2001년 5월 19일, Poster

박재후, 박병건, 조문주, 황철성, 한영기, 양두영, 오기영, 황철주

Gate 박막용 HFO₂ 박막의 증착과 분석

한국재료학회, 공주대학교, 2001년 5월 19일, Poster

Sang Yeol Kang, Cheol Seong Hwang, Hyeong Joon Kim

Deposition of Ru thin films by MOCVD using direct liquid injection system

MRS Spring Meeting, San Francisco, USA, April 17 (2001)

Young Ki Han, Cheol-Hoon Yang, Dong-Hyun Kim, Geun-Jo Han, Ki-Young Oh, Ju Ho Song,Jaehoo Park

Preparation and characterization of (Ba,Sr)TiO₃ thin films by liquid source chemical vapor deposition

MRS Spring Meeting, San Francisco, USA, April 20 (2001)

S-H. Kim, H-J. Woo, D-Y. Park, D-S. Lee, J. Ha and C.S. Hwang

Electrode structures for reliable Pb(Zr_xTi_1-x)O₃ ferroelectric thin film devices

13th International Symposium on Integrated Ferroelectrics, Colorado Springs, USA, March 11-14 (2001), Poster

S-H. Kim, H-J. Woo, D-Y. Park, D-S. Lee, J. Ha and C.S. Hwang

Low voltage switching in Pb(Zr_xTi_1-x)O₃ thin films

13th International Symposium on Integrated Ferroelectrics, Colorado Springs, USA, March 11-14 (2001)

S. Jeong, H.R. Kim, and C.S. Hwang

Low temperature deposition of Pb(ZrxTi1-x)O3 thin films by LDS metal-organic chemical vapor deposition

13th International Symposium on Integrated Ferroelectrics, Colorado Springs, USA, March 11-14 2001, Poster

C.S. Hwang, and J-H. Park

Compositional variation of metal-organic chemical vapor deposited SrTiO₃ thin films along the capacitor hole having a diameter of 0.15 μm

13th International Symposium on Integrated Ferroelectrics, Colorado Springs, USA, March 11-14 (2001)