18 |
±èÇý·É, Á¤½ÃÈ, ÀüÃæ¹è, ±Ç¿À¼º, Ȳö¼º, ÇÑ¿µ±â, ¾çµÎ¿µ, ¿À±â¿µ, ȲöÁÖ ¾×ü¼ö¼Û À¯±â±Ý¼Ó ÈÇÐÁõÂø¹ý(LDS-MOCVD)¿¡ ÀÇÇØ PtÀü±Ø°ú IrÀü±Ø À§¿¡ Àú¿Â(400¡É-500¡É)ÁõÂøµÈ Pb(ZrxTi1-x)O3 ¹Ú¸·ÀÇ Æ¯¼ººÐ¼® Çѱ¹¼¼¶ó¹ÍÇÐȸ, °¿ø´ëÇб³, 2000³â 10¿ù 21ÀÏ
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17 |
À̵¿¼ö, ¹Úµ¿¿¬, ¿ìÇöÁ¤, ±è½ÂÇö, ÇÏÁ¶¿õ, Ȳö¼º, À±ÀÇÁØ Giant grain growth of platinum thin film on thermally oxidized silicon wafer Çѱ¹¼¼¶ó¹ÍÇÐȸ, °¿ø´ëÇб³, 2000³â 10¿ù 21ÀÏ
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16 |
¹ÚÀçÈÄ, ¹Úº´°Ç, ±èÇý·É, Ȳö¼º, ÇÑ¿µ±â, ±èµ¿Çö, ¿À±â¿µ, ¾çµÎ¿µ, ȲöÁÖ Gate dielectric ¿ë ÈÇÐÁõÂø¹ý(CVD)¿¡ ÀÇÇØ ÁõÂøµÈ HfO2 ¹Ú¸·ÀÇ Æ¯¼ººÐ¼® Çѱ¹¼¼¶ó¹ÍÇÐȸ, °¿ø´ëÇб³, 2000³â 10¿ù 21ÀÏ
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15 |
±è½ÂÇö, ¹Úµ¿¿¬, À̵¿¼ö, ¿ìÇöÁ¤, ÇÏÁ¶¿õ, Ȳö¼º, À±ÀÇÁØ The Reliable PZT Thin Films with IrO2/Pt Hybrid Heterostructure Eletrode for High Density Nonvolatile Memory Devices Çѱ¹¼¼¶ó¹ÍÇÐȸ, °¿ø´ëÇб³, 2000³â 10¿ù 20ÀÏ
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14 |
S-H. Kim, D-Y. Park, D-S. Lee, H-J. Woo, J. Ha and C-S. Hwang, and E. Yoon Effects of voltage distribution in Pt/SrBi2Ta2O9/Ta2O5/Si structure on memory window of ferroelectric gate International Symposium on Applications of Ferroelectrics, Hawaii, USA, July 31 (2000), Poster |
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13 |
Hyun-Jung Woo, D-Y. Park, D-S. Lee, S-H. Kim, J. Ha and C.S. Hwang, E. Yoon Microstructural modification of Pt electrode for simple stacked FeRAMs International Symposium on Applications of Ferroelectrics, Hawaii, USA, July 31 (2000), Poster
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12 |
Hyun-Jung Woo, D-Y. Park, D-S. Lee, S-H. Kim, J. Ha and C.S. Hwang, E. Yoon Simple stacked electrode structure for high density ferroelectric memory devices International Symposium on Applications of Ferroelectrics, Hawaii, USA, July 31 (2000), Poster
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11 |
Seung-Hyun Kim, D-Y. Park, D-S. Lee, H-J. Woo, J. Ha and C.S. Hwang, E. Yoon The reliable PZT thin film capacitors with IrO2/Pt hybrid electrode on TiN/poly-Si for high density nonvolatile memory devices International Symposium on Applications of Ferroelectrics, Hawaii, USA, July 31 (2000), Poster
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10 |
Dong-Yeon Park, S-H. Kim, D-S. Lee, H-J. Woo, J. Ha and C.S. Hwang, E. Yoon The effect of IrO2 thickness on ferroelectric properties of Pb(ZrxTi1-x)O3 thin film with IrO2/Pt hybrid electrodes International Symposium on Applications of Ferroelectrics, Hawaii, USA, July 31 (2000), Poster
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9 |
Dong-Su Lee, D-Y. Park, S-H. Kim, H-J. Woo, J. Ha and C.S. Hwang, E. Yoon Giant grained platinum electrodes for ferroelectric devices application International Symposium on Applications of Ferroelectrics, Hawaii, USA, Aug. 1 (2000), Poster
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