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Àú¿Â MOCVD ¹æ¹ýÀ¸·Î ÁõÂøÇÑ (Ba,Sr)TiO3 ¹Ú¸·ÀÇ ¿­Ã³¸® Á¶°Ç¿¡ µû¸¥ ´©¼³Àü·ù Àüµµ ±â±¸

Çѱ¹Àç·áÇÐȸ, Àü³²´ëÇб³, 2000³â 5¿ù 19ÀÏ

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¾×ü¼ö¼Û À¯±â±Ý¼Ó È­ÇÐÁõÂø¹ý(LDS-MOCVD)¿¡ ÀÇÇÑ Pb(Zr1-xTix)O3 ¹Ú¸·ÀÇ Àú¿Â(400-500¡É)ÁõÂø ¹× Ư¼ººÐ¼®

Çѱ¹Àç·áÇÐȸ, Àü³²´ëÇб³, 2000³â 5¿ù 19ÀÏ

5

H.J.Woo, D.Y.Park, D.S.Lee, S.H.Kim, J.Ha, C.S.Hwang and E.Yoon

Study on simple stacked electrode structure for high density ferroelectric memory devices

12th International Symposium on Integrated Ferroelectrics, Aachen, Germany, March 12-15 (2000), Poster

4

J.Song, S.Jeong, J.Park and C.S.Hwang

Oxidation behavior of TiAlN diffusion barrier layer beneath Pt, Ir and Ru

12th International Symposium on Integrated Ferroelectrics, Aachen, Germany, March 14 (2000), Poster

3

J.Song, S.Jeong, J.Park and C.S.Hwang

Oxidation behavior of TiAlN diffusion barrier layer beneath Pt, Ir and Ru

12th International Symposium on Integrated Ferroelectrics, Aachen, Germany, March 14 (2000), Poster

2

J.Park, C.S.Hwang and D.Y.Yang, C.H.Yang, D.H.Kim, Y.K.Han, C.J.Hwang

Electrical structure of (Ba,Sr)TiO3 thin films deposited by low temperature MOCVD

12th International Symposium on Integrated Ferroelectrics, Aachen, Germany, March 14 (2000)

1

C.S.Hwang, J.Song, S.Y.Kang, J.Park, H.R.Kim, Y.J.Cho, O.S.Kwon, J.C.Shin, K.H.Choi, S.Y.No, H.J.Kim and D.Y.Yang, C.H.Yang, Y.K.Han, C.J.Hwang

The high dielectric and ferroelectric capacitor technologies using all CVD processes

12th International Symposium on Integrated Ferroelectric, Aachen, Germany, March 14 (2000)