| 31 |
Yeon Woo Yoo, Woongkyu Lee, Woojin Jeon, Cheol Hyun An, Cheol Seong Hwang Properties of atomic layer deposited ZrO2 films on various substrates with new Zr precursor
CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, October 14-18 (2013), poster
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| 30 |
Un Ki Kim, Sang Ho Rha, Jeong Hwan Kim, Yoon Jang Chung, Jisim Jung, Eun Suk Hwang, Joohwi Lee, Tae Joo Park, Jung-Hae Choi, Cheol Seong Hwang Study on the defects in metal-organic chemical vapor deposited zinc tin oxide using negative bias illumination stability analysis
CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, October 14-18 (2013), poster
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| 29 |
Woongkyu Lee, Woojin Jeon, Yeon Woo Yoo, Cheol Hyun An, Cheol Seong Hwang Formation of micro-defects in atomic layer deposited SrTiO3 films by rapid thermal annealing CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, October 14-18 (2013), poster
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| 28 |
Woojin Jeon, Woongkyu Lee, Yeon Woo Yoo, Cheol Hyun An, Cheol Seong Hwang
Understanding the variations in leakage conduction mechanism of ALD TiO2 film by Al-doping CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, October 14-18 (2013), poster
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| 27 |
Yu Jin Kim, Min Hyuk Park, Han Joon Kim, Doo Seok Jeong, Cheol Seong Hwang Negative capacitance in ferroelectric oxides CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, October 14-18 (2013)
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| 26 |
Yeon Woo Yoo, Woongkyu Lee, Woojin Jeon, Cheol Hyun An, Won Seok Han and Cheol Seong Hwang Atomic Layer Deposited ZrO2 Films on Various Substrates with New Zr Precursor ALD, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013), poster
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| 25 |
An Cheol Hyun, Woojin Jeon, Woongkyu Lee, Yeon Woo Yoo and Cheol Seong Hwang Improving step coverage of SrRuO3 film grown by combining ALD SrO and CVD RuO2 or Ru layers ALD, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013), poster
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| 24 |
Seul Ji Song, Sang Woon Lee, Jun Yeong Seok, Jung Ho Yoon, Kyung Jean Yoon, Clement Lansalot, Chang Hee Ko, and Cheol Seong Hwang Atomic Layer deposition of Tantalum oxide film using Ta(N(C4H9))(C5H4)(N(C2H5)2)2 and plasma-activated H2O ALD, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013), poster
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| 23 |
Woongkyu Lee, Woojin Jeon, Yeon Woo Yoo, Cheol Hyun An and Cheol Seong Hwang Reducing Micro-defect Formation in Atomic Layer Deposited SrTiO3 Films during Crystallization Annealing
ALD, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013), poster
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| 22 |
Jae ho Lee, Il-Hyuk Yu, Sang Young Lee, and Cheol Seong Hwang Dielectric characteristics of phase controlled Hf1-xZrxO2 high-k materials ALD, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013), poster
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