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10

C.S. Hwang, Moonju Cho, Jaehoo Park, Hong Bae Park

Characterization of the thermal stability and chemical interaction between high-k thin films and Si substrate using transmission electron microscopy

Korea Vacuum Society, Kyung Joo, 2002³â 9¿ù 24ÀÏ 

9

Seung-Hyun Kim, C-Y. Koo, S-M. Ha, H-J. Woo, J. Ha, C.S.Hwang, K-H. Hwang

electromechanical properties of Pb(Zr,Ti)O3 films for MEMS applications

The 4th Japan-Korea Conperence on Ferroelectrics, Osaka university, Osaka, Japan, Aug 21-23 (2002), Poster

8

Cheol seong hwang

thickness-dependent dielectric constiants of (Ba,Sr)TiO3 thin films having Pt and conducting oxide electrodes

The 4th Japan-Korea Conperence on Ferroelectrics, Osaka university, Osaka, Japan, Aug 21-23 (2002)

7

JinShi-Zhao, Seehwa Jeong, Jieun Lim, Cheol Seong Hwang, Seung-Hyun Kim

Heat-treatment induced ferroelectric fatigue of Pt/Sr1-xBi2+yTa2O9/Pt tin-film capacitors

International Joint Conference on the Application of Ferroelectrics, Nara-ken New Public Hall, Nara, Japan, May 28- June 1 (2002)

6

Ji Eun Lim, Keum Suk Cho, Cheol Seong Hwang, Seung-Hyun Kim, Dong-Su Lee, Hyun-Jung Woo, Chang-Young Koo, Jowoong Ha

ferroelectric fatigue in sol-gel derived Pb(Zr0.40,Ti0.60)O3 thin films having Pt bottom and PtOx top electrides

International Joint Conference on the Application of Ferroelectrics, Nara-ken New Public Hall, Nara, Japan, May 28- June 1 (2002)

5

Young Jin Cho, Yo-Sep Min, Jung-Hyun Lee, Jeom Sik Kim, Ji Hun Kim, Cheol Seong Hwang

characterization of (Ba,Sr)TiO3(BST) thin films grown by liquid delivery metal organic chemical vapor deposition using a novel Ti precursor, Ti(2meip)2

International Joint Conference on the Application of Ferroelectrics, Nara-ken New Public Hall, Nara, Japan, May 28- June 1 (2002)

4

Jaehoo Park, Byoung Keon Park, Moonju Cho, Cheol Seong Hwang, Kiyoung Oh, Youngki Han, Doo Young Yang

Interfacial reaction between chemically vapor deposited HfO2 thin films and Hf-cleaned Si substrate during film growth and post-annealing

International Joint Conference on the Application of Ferroelectrics, Nara-ken New Public Hall, Nara, Japan, May 28- June 1 (2002)

3

Moonju Cho, Jaehoo Park, Byoung Keon Park, Cheol Seong Hwang, Kwang Soo Hyun, Jaehack Jeong, Cheol Soo Park

Si diffusion in HfO2 thin films deposited by atomic layer deposition for gate oxide application

International Joint Conference on the Application of Ferroelectrics, Nara-ken New Public Hall, Nara, Japan, May 28- June 1 (2002)

2

Chang Young Koo, S-H Kim, D-S Lee, H-J Woo, D.Y. Park, J. Yang, J. Ha, C.S. Hwang

Piezoelectric and ferroelectric properties of Pb(Zr,Ti)O3 films for MEMS applications

International Joint Conference on the Application of Ferroelectrics, Nara-ken New Public Hall, Nara, Japan, May 28- June 1 (2002)

1

Seehwa Jeong, Jin-Shi Zhao, Jieun Lim, Cheol seong Hwang, Young Ki Han, Doo Young Yang, Ki Young Oh

A mass-production compatible metal-organic chemical vapor deposition process of Pb(Zr,Ti)O3 thin films at low temperatures

International Joint Conference on the Application of Ferroelectrics, Nara-ken New Public Hall, Nara, Japan, May 28- June 1 (2002)