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Sang Young Lee, Seong Keun Kim, Kyung Min Kim, Gyu-Jin Choi, Jeong Hwan Han, and Cheol Seong Hwang

Electrically Benign Ru Wet Etching Method for Fabricating Ru/TiO2/Ru Capacitor

Journal of The Electrochemical Society, 3, 158, G47-G51 (2011)


1

Tae Joo Park, Jeong Hwan Kim, Jae Hyuck Jang, Cheol Seong Hwang, Hyung-Dong Kang, Yeoul-Kyo Chung, and Yong-Soo Oh

Atomic-Layer-Deposited Dielectric Thin Films on a Cu Clad Laminate Substrate for Embedded Metal–Insulator–Metal Capacitor Applications in Printed Circuit Boards

Journal of the Electrochemical Society, 1, 158, G1-G8 (2011)