8 |
Moonju Cho, Robin Degraeve, Geoffrey Pourtois, Annelies Delabie, Lars-Åke Ragnarsson, Thomas Kauerauf, Guido Groeseneken, Fellow, IEEE, Stefan De Gendt, Marc Heyns, and Cheol Seong Hwang Study of the Reliability Impact of Chlorine Precursor Residues in Thin Atomic-Layer-Deposited HfO2 Layers IEEE Transactions on Electron Devices, 4, 54, 752-758 (2007) |
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7 |
Byung Joon Choi, Seol Choi, Yong Cheol Shin, Cheol Seong Hwang, Jin Wook Lee, Jaehack Jeong, Yoon Jung Kim, Sung-Yeon Hwang, and Suk Kyoung Hong Cyclic PECVD of Ge2Sb2Te5 Films Using Metallorganic Sources Journal of The Electrochemical Society, 4, 154, H318-H324 (2007) |
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6 |
Tae Joo Park, Jeong Hwan Kim, Jae Hyuk Jang, Minha Seo and Cheol Seong Hwang, and Jeong Yeon Won Improvements in the electrical properties of high-k HfO2 dielectric films on Si1-xGex substrates by post deposition annealing Applied Physics Letters, 90, 042915 (2007) |
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5 |
Gyu Weon Hwang, Hyun Ju Lee, Keun Lee, and Cheol Seong Hwang Atomic Layer Deposition and Electrical Properties of PbTiO3 Thin Films Using Metallorganic Precursors and H2O Journal of The Electrochemical Society, 3, 154, G69 (2007) |
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4 |
Takayuki Watanabe, Susanne Hoffmann-Eifert, Shaobo Mi, Chunlin Jia, and Rainer Waser, Cheol Seong Hwang Growth of ternary PbTiOx films in a combination of binary oxide atomic layer depositions Journal of Applied Physics, 101, 014114 (2007) |
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3 |
Dail Eom, Sang Yong No, Cheol Seong Hwang, and Hyeong Joon Kim Deposition Characteristics and Annealing Effect of La2O3 Films Prepared Using La(iPrCp)3 Precursor Journal of The Electrochemical Society, 3, 154, G49-G53 (2007) |
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2 |
Seong Keun Kim, Sang Young Lee, Sang Woon Lee, Gyu Weon Hwang, Cheol Seong Hwang, Jin Wook Lee, and Jaehack Jeong Atomic Layer Deposition of Ru Thin Films Using 2,4-(Dimethylpentadienyl)(ethylcyclopentadienyl)Ru by a Liquid Injection System Journal of The Electrochemical Society, 2, 154, D95-D101, (2007) |
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1 |
Kyung Min Kim, Minha Seo, Byung Joon Choi, Seong Keun Kim, and Cheol Seong Hwang Characteristics of a Capacitive Probe Array for Direct Surface Charge Detection Electrochemical and Solid-State Letters, 1, 10, H34-H37 (2007) |
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