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Facility
[Deposition] ALD system for ZnSnO
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2016-03-29 10:36:21
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Á¦ÀÛȸ»ç : Evertek
¸ðµ¨¸í : PLUS100
¿ëµµ : ZnO, SnO, AlOÁõÂø
Ư¡ :
- Thermal ALD system
- 4 inch traveling wave type chamber
- Bubler system
- ZnO, SnO, AlO
´ã´çÀÚ : °¼®ÀÎ, À̼±Áø
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ALD system for Ru & RuO2
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ALD system for SrTiO3