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[Deposition] ALD system for ZnSnO
  • ±Û¾´ÀÌ ±Ç´ë¼±
  • ÀÛ¼ºÀÏ 2016-03-29 10:36:21
  • Á¶È¸¼ö 638




  • Á¦ÀÛȸ»ç : Evertek
  • ¸ðµ¨¸í : PLUS100
  • ¿ëµµ : ZnO, SnO, AlOÁõÂø
  • Ư¡ :
    - Thermal ALD system
    - 4 inch traveling wave type chamber
    - Bubler system
    - ZnO, SnO, AlO
  • ´ã´çÀÚ : °­¼®ÀÎ, À̼±Áø
  • ¸ñ·Ï





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