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[Deposition] ALD system for TiO2, Al2O3, Al-doped TiO2
  • 글쓴이 권대선
  • 작성일 2016-03-29 10:29:45
  • 조회수 693




  • 제작회사 : Genitech / Quros
  • 모델명 : cyclic-MP1000
  • 용도 : 박막증착
  • 특징 :
    - 8 inch showerhead type chamber
    - Thermal and plasma enhanced ALD process compatible
    - Direct plasma system
    - Bubbler type delivery system
    - Quros L/L chamber with automatic process system
  • 담당자 : 김재현, 백인경
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