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[Deposition] Sputter system for Pt & W
  • ±Û¾´ÀÌ ±Ç´ë¼±
  • ÀÛ¼ºÀÏ 2016-03-25 17:55:46
  • Á¶È¸¼ö 638




  • Á¦ÀÛȸ»ç : Labmade
  • ¸ðµ¨¸í : 
  • ¿ëµµ : ¹Ú¸·ÁõÂø
  • Ư¡ :
    RF and DC power processing 
  • ´ã´çÀÚ : ±è¿µ·Ï, ½Åµ¿ÈÆ, ¹ÚűÕ
  • ¸ñ·Ï





    ÀÌÀü±Û ALD system for NiO, TiO2
    ´ÙÀ½±Û Sputter system for Oxide semiconductor