Home
Login
Join
Sitemap
Research
Member
Publication
Lecture
Board
Album
Research
New computing and Neuromorphic Research
M3D-SoC
ReRAM Device & Array Application
Artificial Neuron and Network
Logic and In-memory Computing
P-bit Computing
Memory & Logic Research
3D DRAM
DRAM Capacitor
Thin Film Transistor
Ferroelectric
Phase Change Memory
Resistive Switching Memory
Facility
HOME > Research > Facility
Facility
[Deposition] Sputter system for Pt & W
±Û¾´ÀÌ
±Ç´ë¼±
ÀÛ¼ºÀÏ
2016-03-25 17:55:46
Á¶È¸¼ö
638
Á¦ÀÛȸ»ç : Labmade
¸ðµ¨¸í :
¿ëµµ : ¹Ú¸·ÁõÂø
Ư¡ :
RF and DC power processing
´ã´çÀÚ : ±è¿µ·Ï, ½Åµ¿ÈÆ, ¹ÚűÕ
¸ñ·Ï
ÀÌÀü±Û
ALD system for NiO, TiO2
´ÙÀ½±Û
Sputter system for Oxide semiconductor